SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREFOR

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United States of America Patent

SERIAL NO

15328623

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Abstract

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A manufacturing method for a semiconductor device is provided. The method comprises: providing a semiconductor substrate (200); sequentially forming an oxide layer (201) and a silicon nitride layer (202) on the semiconductor substrate (200); annealing the silicon nitride layer (202), and then etching an active region (401) by using the silicon nitride layer (202) as a mask, so as to form in the semiconductor substrate (200) a trench (203) for filling an isolation material, wherein the active region (401) comprises a gate region (403) and a source region (404) and a drain region (405) that are respectively located on two sides of the gate region (403), and the gate region (403) comprises a body part connected to the source region (404) and the drain region (405) and a protruding part (406) that protrudes and extends from the body part to the trench; etching-back the silicon nitride layer (202) and forming a lining oxide layer (201) on the sidewall and the bottom of the trench; depositing an isolation material layer (205) to fill the trench; grinding the isolation material layer (205) until the top of the silicon nitride layer (202) is exposed; and etching to remove the silicon nitride layer (202).

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Patent Owner(s)

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CSMC TECHNOLOGIES FAB1 CO LTDJIANGSU 214028

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  • 2015 Application Filing Year
  • H01L Class
  • 25498 Applications Filed
  • 22451 Patents Issued To-Date
  • 88.06 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances20152016201720182019202020212022202320240255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
HAO, Long Wuxi New District, Jiangsu, CN 4 3
JIN, Yan Wuxi New District, Jiangsu, CN 63 269
LI, Wei Wuxi New District, Jiangsu, CN 2284 14552

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  • 2 Citation Count
  • H01L Class
  • 18.50 % this patent is cited more than
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Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges26979357140748325312788503629173801 - 1011 - 2021 - 3031 - 4041 - 5051 - 6061 - 7071 - 8081 - 9091 - 100100 +050010001500200025003000350040004500500055006000650070007500800085009000950010000

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