CONDENSATION-ASSISTED METROLOGY
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United States of America Patent
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Issued Date -
Aug 3, 2017
app pub date -
Jan 28, 2016
filing date -
Jan 28, 2016
priority date (Note) -
Abandoned
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Abstract
An analysis chamber for an optical-metrology tool includes an enclosure having an opening oriented toward an optical-metrology specimen and aligned substantially parallel to the specimen; at least one transparent window arranged in the enclosure; at least one fluid inlet passing through the enclosure, the fluid inlet coupled to an analysis-fluid source; and an enclosure support configured to hold the enclosure above and in proximity to the specimen.
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