System and method for micro-nano machining by femtosecond laser two-photon polymerization

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United States of America Patent

PATENT NO 10884343
APP PUB NO 20170212424A1
SERIAL NO

15500414

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Abstract

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Disclosed are a system and method for micro-nano machining by femtosecond laser two-photon polymerization. The system includes: a femtosecond laser, an external light path modulation unit, an image capture apparatus, a focusing lens, a displacement platform, a computer and a monitoring apparatus, where the image capture apparatus is configured to capture cross-section graphs of a three-dimensional micro-nano device layer by layer, so that modulated femtosecond lasers form parallel beams arranged according to all layers of the cross-section graphs.

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Patent Owner(s)

Patent OwnerAddress
SOUTH UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINANO 1088 XILI XUEYUAN AVENUE NANSHAN DISTRICT SHENZHEN GUANGDONG PROVINCE SHENZHEN CITY GUANGDONG PROVINCE 518055

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cheng, Xing Guangdong, CN 28 234
Cui, Dehu Guangdong, CN 2 4
Li, Ziping Guangdong, CN 15 65
Ming, Jing Guangdong, CN 7 4

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