EVAPORATION APPARATUS
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United States of America Patent
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Issued Date -
Jul 27, 2017
app pub date -
Mar 28, 2016
filing date -
Apr 10, 2015
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Abstract
An evaporation apparatus includes an evaporation chamber for evaporating a substrate to be evaporated. The evaporation chamber includes: a plurality of isolation units configured to divide the evaporation chamber into a plurality of evaporation sub-chambers; a plurality of evaporation sources respectively located in the plurality of evaporation sub-chambers; and a transportation unit arranged opposite to the evaporation sources and configured to move the substrate to be evaporated among the plurality of evaporation sub-chambers.
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