IMPRINT TEMPLATE AND METHOD FOR PRODUCING THE SAME
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United States of America Patent
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app pub date -
Mar 31, 2017
filing date -
Oct 4, 2014
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Abstract
An imprint template is used for photocuring imprinting, and includes a support plate that is transparent with respect to an exposure wavelength used for photocuring imprinting, and has flexibility; a buffer resin layer that is formed on the support plate, and is formed of an elastic material that is transparent with respect to the exposure wavelength; and a resin film mold that is removably bonded to the buffer resin layer, and is transparent with respect to the exposure wavelength, wherein a concave-convex transfer pattern is formed on a surface of the resin film mold.
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