METHOD AND APPARATUS FOR SUBSTRATE STRIPPING
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United States of America Patent
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Aug 26, 2015
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Aug 26, 2014
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Abstract
Methods and apparatus for stripping away portions of substrate are disclosed herein. In some embodiments, a flexible and/or soft impact-element(s) rotates around a rotation axis to drive a peripheral portion across a substrate plane of the substrate and/or to repeatedly collide with the substrate. At least some of the collisions are effective to partially dislodge or to strip away portion(s) of substrate.
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