Nitrogen injection for ARC lamps
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United States of America Patent
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Mar 30, 2021
Grant Date -
Jul 6, 2017
app pub date -
Dec 15, 2016
filing date -
Dec 30, 2015
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Abstract
Systems and methods for reducing contamination of one or more arc lamps are provided. One example implementation is directed to a millisecond anneal system. The millisecond anneal system includes a processing chamber for thermally treating a substrate using a millisecond anneal process. The system further includes one or more arc lamps. Each of the one or more arc lamps is coupled to a water loop for circulating water through the arc lamp during operation of the arc lamp. The system includes a reagent injection source configured to introduce a reagent, such as nitrogen gas, into water circulating through the arc lamp during operation of the arc lamp.
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