OVERHEAD TRAVELING VEHICLE, TRANSPORTATION SYSTEM WITH THE SAME, AND METHOD OF OPERATING THE SAME
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United States of America Patent
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Issued Date -
Jul 6, 2017
app pub date -
Jan 4, 2016
filing date -
Jan 4, 2016
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status (Latency Note)
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Abstract
An overhead traveling vehicle configured to transport wafers includes a mobile drive unit configured to move along a predetermined route on one side of a ceiling and a hoist unit configured to move along the predetermined route according to a position of the mobile drive unit. The mobile drive unit and the hoist unit respectively include a first magnet and a second magnet so that the hoist unit may be hung on the ceiling by the magnetic force generated between the magnets.
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