Electrode Tip for ARC Lamp

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United States of America Patent

APP PUB NO 20170194133A1
SERIAL NO

15380221

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Electrode tips for arc lamps for use in, for instance, a millisecond anneal system are provided. In one example implementation, an electrode for an arc lamp can have an electrode tip. The surface of the electrode tip can have one or more grooves to reduce the transportation of molten material across the surface of the electrode tip. The electrode can include an interface between the electrode tip and a heat sink. The interface can have a shape designed to have a desired lateral temperature distribution across the surface of the electrode tip.

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Patent Owner(s)

Patent OwnerAddress
MATTSON TECHNOLOGY INC47131 BAYSIDE PARKWAY FREMONT CA 94538
BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO LTDNO 8 BUILDING NO 28 JINGHAI ER RD BEIJING 100176

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bremensdorfer, Rolf Bibertal, DE 26 18
Lieberer, Markus Augsburg, DE 10 9
Seifert, Christian Ulm, DE 18 318

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