RESIST COMPOSITION, METHOD FOR FORMING RESIST PATTERN, POLYPHENOLIC COMPOUND FOR USE IN THE COMPOSITION, AND ALCOHOLIC COMPOUND THAT CAN BE DERIVED THEREFROM
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Mar 14, 2017
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Aug 12, 2011
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Abstract
A resist composition containing a compound represented by the general formulas (1) or (2), a method for forming a resist pattern using the composition, a polyphenolic compound for use in the composition, an alcoholic compound that can be derived therefrom, and a method for producing an alcoholic compound represented by general formulas (6) or (7) are described.
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