TRAPPED MEMBRANE
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United States of America Patent
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Issued Date -
Jun 29, 2017
app pub date -
Mar 10, 2017
filing date -
May 31, 2013
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Abstract
A MEMS trapped membrane. The MEMS trapped membrane includes a first layer and a second structure. The first layer has an outer section and an inner membrane. The outer section and inner membrane are detached from each other by a separation, and have inner membrane protrusions and outer section protrusions formed by the separation. The second structure is coupled to the outer section and has second protrusions that overlay corresponding inner membrane protrusions.
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