Substrate transport device and substrate processing apparatus
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United States of America Patent
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Jun 25, 2019
Grant Date -
Jun 22, 2017
app pub date -
Dec 17, 2015
filing date -
Dec 17, 2015
priority date (Note) -
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Abstract
A substrate transport device includes a shaft, a first moving part for moving the shaft in a vertical direction and in a rotational direction, at least one rotation arm attached to the shaft, and a supporting part having an upper surface waved as seen front view, wherein the rotation arm includes a contact rotation arm which directly or indirectly contacts the upper surface of the supporting part.
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