MICROELECTROMECHANICAL PROBE, METHOD OF MANUFACTURING THE SAME AND PROBE SET
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United States of America Patent
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Issued Date -
Jun 22, 2017
app pub date -
Dec 15, 2016
filing date -
Dec 16, 2015
priority date (Note) -
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Abstract
A microelectromechanical probe is manufactured by a MEMS manufacturing process forming a probe body and a cutting process providing a pinpoint portion a cutting face. The probe has a top surface, a body portion, and a pinpoint portion extended in a probing direction from the body portion and provided with first and second sides and a probing end oriented in the probing direction. The cutting face is provided on the top surface, adjoins the first and second sides and the probing end, and has at least one cut mark formed by the cutting process, extended from the first side to the second side and non-parallel to the probing direction. The cutting face descends from an edge cut mark to the probing end.
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