Self-damping end effector

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United States of America Patent

PATENT NO 9862101
SERIAL NO

14978665

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Abstract

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A self-damping end effector including a base, a finger extending from the base and adapted to support a substrate, and a damper associated with the finger, the damper having a natural frequency within a predetermined tolerance of a natural frequency of the finger.

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Patent Owner(s)

Patent OwnerAddress
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES INC35 DORY ROAD GLOUCESTER MA 01930

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
LoPiccolo, Jack Gloucester, US 1 2
Pergande, Paul E Austin, US 25 457

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