Preparation of cryogenic sample for charged-particle microscopy

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United States of America Patent

PATENT NO 9865428
SERIAL NO

15218385

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Abstract

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A method of preparing a sample for study in a charged-particle microscope, whereby the sample is subjected to rapid cooling using a cryogen, comprising the following steps:

    Providing two conduits for transporting cryogenic fluid, each of which conduits opens out into a mouthpiece, which mouthpieces are arranged to face each other across an intervening gap;Placing the sample in said gap;Pumping cryogenic fluid through said conduits so as to concurrently flush from said mouthpieces, thereby suddenly immersing the sample in cryogenic fluid from two opposite sides.

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Patent Owner(s)

Patent OwnerAddress
FEI COMPANY5350 NE DAWSON CREEK DRIVE HILLSBORO OR 97124

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Remigy, Herve-William Eindhoven, NL 1 5

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