Flexible illuminator

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United States of America Patent

PATENT NO 10698226
APP PUB NO 20170168312A1
SERIAL NO

15370931

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Abstract

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A method is disclosed that includes splitting a beam of radiation into a first part of the beam having a first polarization and a second part of the beam having a second polarization, forming a first beam with a first polarization distribution between the first polarization and the second polarization and/or a first intensity distribution by modulating the first part of the beam, forming a second beam with a second polarization distribution between the first polarization and the second polarization and/or a second intensity distribution by modulating the second part of the beam, and combining at least a portion of the first beam having the second polarization and at least a portion of the second beam having the first polarization.

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Patent Owner(s)

Patent OwnerAddress
ASML HOLDING N VHOLLAND WEIDE EINDHOVEN VELDHOVEN NORTH BRABANT

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kelkar, Parag Vinayak Danbury, US 6 16

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