Temperature compensation and operational configuration for bulk acoustic wave resonator devices
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United States of America Patent
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Dec 15, 2020
Grant Date -
Jun 15, 2017
app pub date -
Dec 15, 2016
filing date -
Dec 15, 2015
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Abstract
Operational configuration and temperature compensation methods are provided for bulk acoustic wave (BAW) resonator devices suitable for operating with liquids. Temperature compensation methods dispense with a need for temperature sensing, instead utilizing a relationship between (i) change in frequency of a BAW resonator at a phase with adequate sensitivity and (ii) change in frequency of a phase that is correlated to temperature. Operational configuration methods include determination of an initial phase response of a BAW resonator in which temperature coefficient of frequency is zero, followed by comparison of sensitivity to a level of detection threshold for a phenomenon of interest.
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