GAS SENSOR AND MANUFACTURING METHOD THEREOF
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United States of America Patent
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Issued Date -
Jun 15, 2017
app pub date -
Apr 12, 2016
filing date -
Dec 11, 2015
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Abstract
A gas sensor includes a substrate, a heating layer, an insulation layer and a plurality of arranged detection units. The heating layer is on the substrate. The insulation layer is on the heating layer. The detection units are on the insulation layer, and each detection unit includes a detecting electrode, a separating portion and a reaction sensing film. The separating portion includes a plurality of separating walls extending upwards. The separating walls surround to form an accommodating space. The reaction sensing film is in the accommodating space in the separating portion and in contact with the detecting electrode. An electrochemical reaction is produced when the reaction sensing film comes into contact with a gas under test to cause the detecting electrode to generate a recognition signal corresponding to the gas under test.
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