INFORMATION OBTAINING APPARATUS, INFORMATION OBTAINING METHOD, AND RECORDING MEDIUM

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United States of America Patent

SERIAL NO

15039364

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Abstract

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The present invention relates to an information obtaining apparatus that obtains information of a sample, the information obtaining apparatus including an irradiation unit configured to irradiate the sample with a terahertz wave, a detection unit configured to detect the terahertz wave reflected by the sample, a spectrum obtaining unit configured to obtain a spectrum from a temporal waveform obtained by using a detection result of the detection unit, an angle information obtaining unit configured to obtain information related to an incident angle of the terahertz wave from the irradiation unit with respect to the sample by using the spectrum, and a control unit configured to adjust the incident angle by referring to the information related to the incident angle.

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Patent Owner(s)

Patent OwnerAddress
CANON KABUSHIKI KAISHATOKYO TOKYO METROPOLIS

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Koizumi, Takayuki Yokohama-shi, JP 30 1102

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