MICROSTRUCTURE FORMING APPARATUS
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United States of America Patent
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app pub date -
Dec 29, 2015
filing date -
Dec 11, 2015
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Abstract
A microstructure forming apparatus is adapted for processing a workpiece and includes: a light source for emitting light toward the workpiece; a first axicon disposed between the light source and the workpiece; and a second axicon disposed between the first axicon and the workpiece. Light emitted from the light source forms a high-order Bessel beam after passing through the first axicon and the second axicon in sequence for processing and forming a microstructure in the workpiece.
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