Structure and process for overturned thin film device with self-aligned gate and S/D contacts
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United States of America Patent
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Sep 8, 2016
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Dec 2, 2015
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Abstract
Processes and overturned thin film device structures generally include a metal gate having a concave shape defined by three faces. The processes generally include forming the overturned thin film device structures such that the channel self-aligns to the metal gate and the contacts can be self-aligned to the sacrificial material.
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