ELECTROSTATIC CHUCK AND SEMICONDUCTOR MANUFACTURING APPARATUS
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United States of America Patent
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Jun 8, 2017
app pub date -
Nov 10, 2016
filing date -
Dec 3, 2015
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Abstract
An electrostatic chuck includes a mount base. The mount base includes a base body and an electrostatic electrode, which is located in the base body. The base body is formed from a ceramic that contains aluminum oxide, which serves as a main component, yttrium oxide, magnesium oxide, and calcium oxide. A content percentage of the calcium oxide is 0.4 wt % to 0.6 wt %.
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