FILM FORMING APPARATUS, RECORDING MEDIUM, AND FILM FORMING METHOD
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United States of America Patent
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Jun 8, 2017
app pub date -
Dec 8, 2015
filing date -
Dec 8, 2015
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Abstract
A film forming apparatus includes a lower electrode, an upper electrode provided above and in opposition to the lower electrode and having a plurality of openings, a transport tube which provides a passage extending generally in a vertical direction and connecting to a space above the upper electrode, a gas supply line connected to a side surface of the transport tube and providing a passage communicating with a space in the transport tube, and a gas diffuser gate valve connected to a portion of the side surface of the transport tube at a position lower in the vertical direction than the position at which the gas supply line is connected, wherein the gas diffuser gate valve has a diffusion plate which blocks part of the space in the transport tube.
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