DESMEAR TREATMENT DEVICE AND DESMEAR TREATMENT METHOD
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
Jun 1, 2017
app pub date -
Mar 19, 2015
filing date -
Jun 30, 2014
priority date (Note) -
Published
status (Latency Note)
Importance
Abstract
The present invention has as its object the provision of a desmear treatment device and a desmear treatment method capable of sufficiently removing smear remaining in a to-be-treated object in a short amount of time. The desmear treatment device of the present invention includes: a treatment chamber in which a to-be-treated object is disposed; a light source unit in which an ultraviolet lamp for irradiating the to-be-treated object with ultraviolet rays is housed; a light transmissive window that is disposed between the treatment chamber and the light source unit and that transmits the ultraviolet rays from the ultraviolet lamps; and treatment gas supply means for supplying a treatment gas containing a source of active species to the treatment chamber. The treatment gas supply means includes a treatment gas supply source and a control unit for controlling a supplied amount of the treatment gas from the treatment gas supply source. The control unit has a function of controlling the treatment gas from the treatment gas supply source to be supplied as a purge gas when irradiating the to-be-treated object with ultraviolet rays.
First Claim
Family
International Classification(s)
- [Classification Symbol]
- [Patents Count]
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully