TRANSDUCER ELEMENT AND METHOD OF MANUFACTURING A TRANSDUCER ELEMENT
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United States of America Patent
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Jul 17, 2014
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Jul 17, 2014
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Abstract
The present invention concerns a transducer element (1) which comprises a substrate (5) which comprises a cavity (23) extending through the substrate (5), a backplate (3) which is arranged in the cavity (23) of the substrate (5) and a membrane (2) which is movable relative to the backplate (3). Further, the present invention concerns a method of manufacturing a transducer element (1).
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