SURFACE ACOUSTIC WAVE (SAW) RESONATOR STRUCTURE WITH DIELECTRIC MATERIAL BELOW ELECTRODE FINGERS
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app pub date -
Nov 30, 2015
filing date -
Nov 30, 2015
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Abstract
A surface acoustic wave (SAW) resonator structure includes a substrate, a piezoelectric layer disposed on the substrate, and an interdigital transducer (IDT) electrode disposed over the piezoelectric layer. The IDT electrode includes multiple busbars and multiple electrode fingers extending from each busbar, where the electrode fingers are configured to generate surface acoustic waves in the piezoelectric layer. The SAW resonator structure further includes dielectric material disposed between the piezoelectric layer and at least at portion of the IDT. The dielectric material may be positioned below tips of the electrode fingers, thereby mass-loading the electrode fingers.
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