BINARY PATTERNING FOR THREE-DIMENSIONAL MEMORY FORMATION
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United States of America Patent
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May 25, 2017
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Nov 23, 2015
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Nov 23, 2015
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A method for designing a patterning process for a three-dimensional (3D) memory includes defining a target 3D structure of the 3D memory, to be applied in a periodic structure of layers on a substrate. The target 3D structure is converted into a sequence of multiple steps, each step specifying a respective pattern to be removed and a respective number of the layers to be removed from the periodic structure under the respective pattern. The sequence of steps is sent to one or more manufacturing tools.
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