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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
INNOVATIVE MICRO TECHNOLOGY	GOLETA CA 93117

International Classification(s)

• B81C:PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE M....
• G02B:OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
• B81B:MICRO-STRUCTURAL DEVICES OR SYSTEMS, e.g. MICRO-ME....
• G03F:PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNE....

• [Classification Symbol]

• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
GUDEMAN, Christopher S	Lompoc, US	51	450
Hutchinson, Stuart	Murrieta, US	3	16
Kim, Sangwoo	Santa Barbara, US	152	547
SIGURDSON, Marin	Goleta, US	12	39

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date
7.5 Year Payment	$3600.00	$1800.00	$900.00	Nov 25, 2024
11.5 Year Payment	$7400.00	$3700.00	$1850.00	Nov 25, 2028

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge - 7.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge - 11.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Full Text

US Patent Application No: 2017/0146,793

MICROFABRICATED OPTICAL APPARATUS WITH INTEGRATED TURNING SURFACE

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