Method of measuring a topographic profile and/or a topographic image
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United States of America Patent
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Nov 20, 2018
Grant Date -
May 18, 2017
app pub date -
Jan 19, 2016
filing date -
Nov 18, 2015
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Abstract
Measuring a topographic profile and/or a topographic image of a surface of a sample includes positioning an indenter out of contact with a sample and in a constant position with respect to a headstock; positioning a topographic tip to detect a surface of the sample and positioning a reference structure at a predetermined distance from said surface; measuring the relative position of the indenter with respect to the reference structure by a relative position sensor; translating said sample perpendicular to said longitudinal axis while maintaining the reference structure at said predetermined distance from the surface of the sample by the feedback control system and the second actuator while measuring the relative position of the indenter with respect to the reference structure by the relative position sensor; and generating a topographic profile and/or a topographic image based on measurements of the relative position.
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