RADIATION THERMOMETER, RADIATION TEMPERATURE MEASUREMENT SYSTEM, STORAGE MEDIUM HAVING PROGRAM FOR RADIATION THERMOMETER STORED THEREIN, AND RADIATION TEMPERATURE MEASUREMENT METHOD
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United States of America Patent
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Nov 7, 2016
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Nov 13, 2015
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In order to provide a radiation thermometer with which a temperature of a measurement object disposed in a chamber configured to form plasma therein can be accurately measured in a noncontact manner from outside of the chamber, the radiation thermometer includes an infrared sensor and a window temperature compensation part. The infrared sensor is disposed outside the chamber configured to form plasma therein, and is configured to detect infrared ray emitted from the measurement object in the chamber through a transmission window provided in the chamber. The infrared sensor is configured to output an output signal according to energy of detected infrared ray. The window temperature compensation part is configured to compensate for a pre-compensation temperature of the measurement object being indicated by the output signal of the infrared sensor, on the basis of a temperature of the transmission window.
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