METHOD OF MANUFACTURING MULTI-LAYERED FILM AND MULTI-LAYERED FILM
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Jun 11, 2015
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Jun 20, 2014
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A method of manufacturing a multi-layered film at least includes: a step A of forming an electroconductive layer on a substrate; a step B of forming a seed layer so as to coat the electroconductive layer; and a step C of forming a dielectric layer so as to coat the seed layer. In the step B, a compound including strontium (Sr), ruthenium (Ru), and oxygen (O) is formed as the seed layer by a sputtering method. In the step C, where a substrate temperature is defined by Td when the dielectric layer is formed, 560° C.≦Td≦720° C. is determined.
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