HIGH POWER GALLIUM NITRIDE ELECTRONICS USING MISCUT SUBSTRATES

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United States of America Patent

SERIAL NO

15156979

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Abstract

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A method of fabricating an electronic device includes providing a III-V substrate having a hexagonal crystal structure and a normal to a growth surface characterized by a misorientation from the <0001> direction of between 0.15° and 0.65°. The method also includes growing a first III-V epitaxial layer coupled to the III-V substrate and growing a second III-V epitaxial layer coupled to the first III-V epitaxial layer. The method further includes forming a first contact in electrical contact with the III-V substrate and forming a second contact in electrical contact with the second III-V epitaxial layer.

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Patent Owner(s)

Patent OwnerAddress
NEXGEN POWER SYSTEMS INC2010 EL CAMINO REAL SANTA CLARA TOWN CENTRE # 1048 SANTA CLARA CA 95050

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bour, Dave P Cupertino, US 8 24
Kizilyalli, Isik C San Francisco, US 145 1919
Prunty, Thomas R Santa Clara, US 53 457
Ye, Gangfeng Fremont, US 9 45

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