Charged particle system and method for measuring deflection fields in a sample
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jun 25, 2019
Grant Date -
May 11, 2017
app pub date -
Sep 7, 2016
filing date -
Sep 7, 2015
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
There is provided a charged particle system (100) that has: illumination optics (104) for illuminating a sample with charged particles; an imaging deflector system (112) disposed behind an objective lens (110); a detector (116) having a detection surface (115), imaging optics (114) disposed behind the imaging deflector system (112) and operative to focus the charged particles as diffraction discs (2) onto the detection surface (115); a storage unit (120) for storing intensity information detected by the detector (116); and a controller (130) for controlling the imaging deflector system (112). The controller (130) controls the imaging deflector system (112) to cause the charged particles passing through a given position of particle impingement on the sample to be deflected under successively different sets of deflection conditions and to bring the diffraction discs (2) into focus onto successively different regions of the detection surface (115).
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully