DIAPHRAGM VALVE, FLUID CONTROL DEVICE, SEMICONDUCTOR MANUFACTURING APPARATUS, AND SEMICONDUCTOR MANUFACTURING METHOD
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United States of America Patent
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N/A
Issued Date -
May 11, 2017
app pub date -
Jun 17, 2015
filing date -
Jun 30, 2014
priority date (Note) -
Published
status (Latency Note)
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Abstract
A flat portion of a bottom surface of a depression of a body is provided with a spot facing so as to include a portion of a fluid outflow channel, which portion is open to the bottom surface of the depression.
First Claim
Other Claims data not available
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| Country | kind | publication No. | Filing Date |
|---|---|---|---|
| JP | B2 | JP6336345 | Jun 30, 2014 |
| KR | A | KR20180123185 | Jun 17, 2015 |
| KR | A | KR20160143832 | Jun 17, 2015 |
| CN | A | CN106471298 | Jun 17, 2015 |
| WO | A1 | WO2016002515 | Jun 17, 2015 |
| TW | B | TWI672458 | Jun 29, 2015 |
International Classification(s)
- 2015 Application Filing Year
- F16K Class
- 1801 Applications Filed
- 1435 Patents Issued To-Date
- 79.68 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 4 Citation Count
- F16K Class
- 31.02 % this patent is cited more than
- 8 Age