Three dimensional (3D) robotic micro electro mechanical systems (MEMS) arm and system
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United States of America Patent
Stats
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Aug 28, 2018
Grant Date -
May 11, 2017
app pub date -
Oct 17, 2016
filing date -
May 21, 2008
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A micro assembly having a substrate and an operating plane coupled to the substrate. The operating plane is movable from an in-plane position to an out-of-plane position. One or more electric connections provide electric power from the substrate to the operating plane in the out-of-plane position. A tool is coupled to the operating plane. The tool is operable to receive electric power from the operating plane to perform work.
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International Classification(s)
- 2016 Application Filing Year
- H02N Class
- 436 Applications Filed
- 305 Patents Issued To-Date
- 69.96 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- H02N Class
- 0 % this patent is cited more than
- 7 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Feb 28, 2026 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Feb 28, 2030 |
