Forming method for acigs film at low temperature and manufacturing method for solar cell by using the forming method
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United States of America Patent
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May 4, 2017
app pub date -
Dec 23, 2015
filing date -
Oct 30, 2015
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Disclosed is a method of forming a CIGS-based thin film having high efficiency using a simple process at relatively low temperatures. The method includes an Ag thin film forming step and an ACIGS forming step of depositing Cu, In, Ga, and Se on the surface of the Ag thin film using a vacuum co-evaporation process. Ag, constituting the Ag thin film, is completely diffused, while Cu, In, Ga, and Se are deposited to form ACIGS together with Cu, In, Ga, and Se co-evaporated in a vacuum during the ACIGS forming step. The Ag thin film is formed and CIGS elements are then deposited using vacuum co-evaporation to form an ACIGS thin film having improved power generation efficiency at a relatively low temperature of 400° C. or less using only a single-stage vacuum co-evaporation process.
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