TRANSFER MODULE FOR A MULTI-MODULE APPARATUS

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United States of America Patent

APP PUB NO 20170125269A1
SERIAL NO

14926612

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Abstract

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A transfer module for a multi-module apparatus may include a) a plurality of facets, wherein a facet of said plurality comprises a port configured to hold a module; and b) at least one robot arm configured to move an object to and from the module through said port via a combination of extension and rotational movements.

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Patent Owner(s)

Patent OwnerAddress
AIXTRON SEDORNKAULSTRA¿E 2 HERZOGENRATH 52134

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dunham, Scott Fremont, US 4 175
O'Brien, Timothy Sunnyvale, US 49 419
Zuberi, Tahir Milpitas, US 1 2

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