Electrostatically actuated oscillating structure with oscillation starting phase control, and manufacturing and driving method thereof
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United States of America Patent
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Mar 20, 2018
Grant Date -
May 4, 2017
app pub date -
Jan 9, 2017
filing date -
Dec 12, 2013
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Abstract
An electrostatically actuated oscillating structure includes a first stator subregion, a second stator subregion, a first rotor subregion and a second rotor subregion. Torsional elastic elements mounted to the first and second rotor subregions define an axis of rotation. A mobile element is coupled to the torsional elastic elements. The stator subregions are electrostatically coupled to respective regions of actuation on the mobile element. The stator subregions exhibit an element of structural asymmetry such that the electrostatic coupling surface between the first stator subregion and the first actuation region differs from the electrostatic coupling surface between the second stator subregion and the second actuation region.
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