METHOD FOR CLEANING A WASTE GAS FROM A METAL REDUCTION PROCESS
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Jun 25, 2015
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Jul 3, 2014
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Abstract
Gaseous perfluorocarbons in a waste gas are adsorbed by an adsorption device. Subsequently a decomposition of the perfluorocarbons takes place with formation of hydrogen fluoride. The hydrogen fluoride is converted with an oxide of a metal to be reduced, to the metal fluoride thereof. The metal fluoride formed is then fed again to the reduction process.
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