FACET-SELECTIVE GROWTH OF NANOSCALE WIRES
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United States of America Patent
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Issued Date -
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app pub date -
Jun 11, 2015
filing date -
Jun 13, 2014
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
The present invention generally relates to nanoscale wires, and to systems and methods of producing nanoscale wires. In some aspects, the present invention is generally related to facet-specific deposition on semiconductor surfaces. In one embodiment, a first surface of a nanoscale wire, or a semiconductor, is preferentially oxidized relative to a second surface, and material is preferentially deposited on the second surface relative to the first surface. For example, the nanoscale wire or semiconductor may be a silicon nanowire that is initially exposed to an etchant to remove silicon oxide, then exposed to an oxidant under conditions such that one facet or surface (e.g., a {113} facet) is oxidized more quickly than another facet or surface (e.g., a {111} facet). Material may then be deposited or immobilized on the less-oxidized facet relative to the more-oxidized facet. Other embodiments of the invention may be directed to articles made thereby, devices containing such nanoscale wires or semiconductors, kits involving such nanoscale wires or semiconductors, semiconductor surfaces, or the like.

First Claim
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- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
PRESIDENT AND FELLOWS OF HARVARD COLLEGE | 17 QUINCY STREET CAMBRIDGE MA 02138 |
International Classification(s)
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Day, Robert | Somerville, US | 35 | 707 |
Gao, Ruixuan | Cambridge, US | 12 | 100 |
Lieber, Charles M | Lexington, US | 100 | 6398 |
Mankin, Max Nathan | Cambridge, US | 3 | 4 |
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