METHOD FOR MANUFACTURING ZINC OXIDE FILMS
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United States of America Patent
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Apr 20, 2017
app pub date -
Jul 11, 2016
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Oct 16, 2015
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Abstract
A method for manufacturing zinc oxide films according to the present invention includes: a step (Step 1) for mixing zinc salt, aqueous ammonia, and organic acid to prepare a source solution containing a zinc ammine complex; a step (Step 2) for depositing a zinc oxide film on a substrate using the source solution by a liquid phase deposition method; and a step (Step 3) for irradiating the deposited zinc oxide film with UV light to remove the organic acid from the deposited zinc oxide film. The present invention can provide a method for manufacturing zinc oxide films that can simplify a device configuration of a manufacturing device.
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