ION IMPLANTATION AND ANNEALING FOR THIN-FILM CRYSTALLINE SOLAR CELLS
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United States of America Patent
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Apr 18, 2016
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May 5, 2009
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Abstract
A back contact back junction thin-film solar cell is formed on a thin-film semiconductor solar cell. Preferably the thin film semiconductor material comprises crystalline silicon. Base regions, emitter regions, and front surface field regions are formed through ion implantation and annealing processes.
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