RADIO FREQUENCY IDENTIFICATION IN-METAL INSTALLATION AND ISOLATION FOR SPUTTERING TARGET
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United States of America Patent
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May 13, 2015
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May 30, 2014
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Abstract
A RFID tag containment combination for a sputter target/backing plate assembly. A bore is provided in either the target or the backing plate and is adapted for snug receipt of a plug therein. The plug comprises a recessed portion thereof configured to carry the RFID tag therein.
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