Method of preparing a sample for microstructure diagnostics, and sample for microstructure diagnostics

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United States of America Patent

PATENT NO 10734193
APP PUB NO 20170097290A1
SERIAL NO

15286699

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Abstract

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A method of preparing a sample for microstructure diagnostics on a sample body by material-ablating processing, and subsequently producing an examination region on the sample portion, the examination region including a target region to be examined, the method including producing a terracing zone including the target region on at least one surface of the sample portion, wherein at least one notch with flanks extending obliquely in relation to the surface is produced next to the target region by material-ablating beam processing to produce the terracing zone, and ablating material from the surface of the sample portion in the region of the terracing zone by an ion beam, which is radiated under grazing incidence onto the surface obliquely to the direction of extent of the notch such that the target region lies behind the notch in the incoming radiation direction of the ion beam and, as a result of the terracing in the region behind the notch, the surface is recessed substantially parallel to the original height of the surface by way of ion beam processing.

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Patent Owner(s)

Patent OwnerAddress
FRAUNHOFER-GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG E VHANSASTRASSE 27C MÜNCHEN 80686

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Busch, Richard Halle, DE 1 1
Höche, Thomas Halle, DE 3 5
Krause, Michael Halle, DE 61 454
Schusser, Georg Salzatal, DE 2 5

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