MEMS ACTUATOR BEAM WITH INSULATOR TABS
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United States of America Patent
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N/A
Issued Date -
Mar 30, 2017
app pub date -
Sep 24, 2015
filing date -
Sep 24, 2015
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
This disclosure provides systems, methods, and apparatus for providing protective coatings on electromechanical systems (EMS) devices. A display apparatus can include an electrostatic actuation assembly for controlling the position of a suspended portion of a display element. The electrostatic actuation assembly can include a load beam, drive beam, and a coating disposed over a portion of the drive beam. The coating can include a plurality of raised tabs spaced apart from each other. One or both of the size of the raised tabs and a pitch between raised tabs can be varied along a surface of the drive beam. The voltage used to actuate the actuator is, in part, related to the shape and relative position of the load and drive beams. The raised tabs can be sized, spaced, or positioned to affect a desired rest position and rest shape of the drive beam relative to the load beam.
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