Active airbearing device
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United States of America Patent
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Mar 20, 2018
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N/A
app pub date -
Apr 2, 2014
filing date -
Mar 18, 2014
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Abstract
The present invention discloses an active airbearing device, including a airbearing body, a gas film active adjusting unit, a support body detection unit and a drive control unit, wherein the support body detection device measures a state of airbearing, the drive control system generates a control signal according to a detection signal, drives and controls the gas film active adjusting device to generate an active action, and dynamically adjusts the form of gas films on a airbearing surface, so as to dynamically adjust pressure distribution of gaps between the gas films of the airbearing device, thereby improving dynamic stiffness characteristics of the airbearing. Through the present invention, the dynamic stiffness characteristics of the airbearing can be improved significantly, and the purpose of stabilizing the airbearing is achieved; in addition, the active airbearing device according to the present invention also has the characteristics of a compact structure, convenient operation and control, and high precision, and thus is especially suitable for occasions such as ultra-precision machining or high speed spindle which has high requirements for dynamic stiffness of support.
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