PLANETARY WAFER CARRIERS
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United States of America Patent
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Issued Date -
Mar 16, 2017
app pub date -
Sep 15, 2016
filing date -
Sep 15, 2015
priority date (Note) -
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Abstract
A wafer carrier for a plurality of wafers, the wafer carrier having a platen with a plurality of openings and a plurality of wafer retention platforms, the platen configured to rotate about a first axis, the plurality of wafer retention platforms configured to rotate about respective second axes, each of the wafer retention platforms rotatably coupled to one of the plurality of openings by friction reducing bearings, the platen and the plurality of wafer retention platforms and the friction reducing bearings all being constructed of the same material.
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