ELECTROMECHANICAL SYSTEMS DEVICE WITH SEGMENTED ELECTRODES AND THIN FILM TRANSISTORS FOR INCREASING STABLE RANGE
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United States of America Patent
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Mar 16, 2017
app pub date -
Sep 11, 2015
filing date -
Sep 11, 2015
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Abstract
This disclosure provides systems, methods, and apparatus for electromechanical systems (EMS) devices with a plurality of electrically isolated electrode segments each connected to a distinct thin film transistor (TFT), where a plurality of TFTs drive the EMS device by applying a common voltage to the plurality of electrode segments. The plurality of TFTs can be configured to allow each electrode segment to have its own voltage during actuation. The EMS device can include a substrate, a stationary electrode over the substrate, and a movable electrode over the stationary electrode with a gap defined between the stationary electrode and the movable electrode. At least one of the stationary electrode and the movable electrode includes the plurality of electrode segments. The plurality of TFTs and the plurality of electrode segments can increase the stable range of the EMS device.
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