HEAT TREATMENT APPARATUS
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United States of America Patent
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app pub date -
Nov 4, 2016
filing date -
Jul 7, 2014
priority date (Note) -
Abandoned
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Abstract
A heat treatment apparatus includes: a heat treatment chamber that performs heating treatment for a treatment object thereinside; and a thermal insulator disposed inside the heat treatment chamber and surrounding a receiving area for the treatment object. The heat treatment chamber includes a side wall portion and a lid portion configured to be attachable to and detachable from the side wall portion. The thermal insulator includes a ceiling disposed on the inside of the lid portion. The ceiling includes a thermal insulator lid that is at least part of the ceiling and is united to the lid portion.
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