Mass transfer tool manipulator assembly with remote center of compliance
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jan 22, 2019
Grant Date -
Mar 16, 2017
app pub date -
Nov 29, 2016
filing date -
May 8, 2014
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
Systems and methods for transferring a micro device or an array of micro devices to or from a substrate are disclosed. In an embodiment, a remote center robot allows on-the-fly alignment between a micro pick up array and a target substrate. The remote center robot may include a plurality of symmetric linkages that move independently and share a remote rotational center. In an embodiment, the remote rotational center may be positioned at a surface of the micro pick up array to prevent damage to the array of micro devices during transfer.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully